MOCVD (Metal Organic Chemical Vapor Deposition) equipment refers to the equipment that forms a film for compound semiconductors while using organic metals and gases as raw materials. LEDs, smartphones, and electric vehicles equipped with automated driving systems have dramatically enriched society in recent years. Compound semiconductors are indispensable as the core material for these revolutionary devices, and MOCVD systems like ours is needed for manufacturing compound semiconductors. Our company was the first in the world to introduce self-developed commercial MOCVD systems in 1983. Currently, we research, manufacture, and sell various types of equipment depending on applications (for research, for mass production), materials [GaN (gallium nitride), Ga2O3 (gallium oxide), GaAs/InP (gallium arsenide/indium phosphide)], size and number of wafer (2 inches x singular/several wafers).
Sales Department, CSE Section, Innovation Unit, Taiyo Nippon Sanso Corporation
E-mail: mocvd@tn-sanso.co.jp
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