New Technologies & Systems
Structural analysis in the field of plant engineering
This paper presents several examples of structural analysis within our plant engineering equipment. Structural analysis is a numerical method that uses computers to quantitatively evaluate deformation, stress, and vibration characteristics. The plant engineering equipment have a wide variety of complex structures consisting of multiple parts. By utilizing structural analysis, strength and vibration characteristics of equipment can be evaluated, which are difficult to obtain with actual equipment. The approach by structural analysis enables to ensure the safety and reliability of our equipment that can withstand the anticipated loads.
(Full pages PDF:329KB)
Development of rotary TIG welding technology for wire and arc additive manufacturing
We developed a new TIG welding technology for wire and arc additive manufacturing (WAAM), metal additive manufacturing that applies arc welding. The developed torch has an unprecedentedly innovative structure in which a wire is fed from the torch center and arc heat is applied by a tungsten electrode rotating around the wire. We confirmed through various experiments that more uniform stacked products can be obtained with this new TIG welding technology than with conventional TIG welding and that it is important to apply an appropriate electrode rotation speed with respect to the manufacturing speed.
(Full pages PDF:682KB)
Supply technology for high-purity solid-state precursor MoO2Cl2 for semiconductors
We developed elemental technologies for the development and commercialization of MoO2Cl2 materials and their supply system and obtained the following results.
- We established high quality MoO2Cl2 materials containing less than 100 wt.ppb of metallic impurities and their quality management technology.
- We established a handling management technology to maintain the quality of MoO2Cl2.
- We established a container maintenance technology for returnable containers.
- We optimized the container heating method and established a technology for stable supply of MoO2Cl2 even at high flow rates.
Through the establishment of these technologies, we have built a system that can handle the entire process of MoO2Cl2 filling, supply, container maintenance, and quality control.
(Full pages PDF:1437KB)
Development of abatement system using no fossil fuels (Combustion Abatement System using H2: Blisters Burner H2)
In response to the social issues of reducing perfluorocarbon (PFC) emissions and utilizing non-fossil energy as measures against global warming, it is necessary to provide the market with not only electrification, but also an option for industrial utilization of various non-fossil energy sources.
We have developed a hydrogen combustion waste gas abatement system (Blisters Burner H2) targeting the semiconductor industry, which uses PFC, and will bring it to market in April 2024. This product uses only H2 gas as fuel gas, achieving energy saving compared to conventional products using fossil fuel for combustion.
(Full pages PDF:548KB)