Product Details

Combustion type exhaust gas treatment equipment

Combustion type exhaust gas treatment equipment
The company provides optimal equipment that meets the customer's usage conditions based on the know-how of development, design, and production of exhaust gas treatment equipment (abatement equipment) acquired over the years. Combustion type abatement equipment suppresses by-products (NOx, CO, etc.) of persistent gas such as combustible gas, toxic gas and PFC discharged in the CVD process and etching process, and combusts and decomposes with high efficiency.

Service/Business

Products contributing to the environmentSemiconductor related equipmentSemiconductor material gas piping work

Business field/Industry

ChemistrySemiconductors/electronic partsEnvironment/energy

Purpose/Use

To reduce greenhouse gas emissionsTo detoxify dangerous gas
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目的・用途別