大陽日酸株式会社(社長 CEO:市原 裕史郎)では、SiCやGaNなどの次世代パワーデバイスの接合材として高強度かつ高信頼を実現できる銅ナノ粒子を用いたシート状の接合材の開発に成功しましたので、お知らせいたします。
1.背景
パワーデバイスは、電気自動車やハイブリッド車などの用途でインバーターやコンバーターなどの電力変換器に用いられている半導体素子ですが、パワーデバイスの高効率化にはモジュールの小型化と利用温度の上限を高めて出力パワー密度を高める必要があります。
しかし、現在主流であるSiパワーデバイスでは動作温度が150℃であり、耐熱性の問題でモジュールの小型化の限界にきています。
一方、SiCやGaNなどのデバイス材料は200℃以上での動作が可能とされ、Siパワーデバイス代替として期待されていますが、従来のSiパワーデバイスにおける電子部品の接合材として、広く用いられているはんだ系の材料は、耐熱性に乏しく、高温環境での使用が見込まれるSiCパワーデバイス向けには不向きで、高温動作に耐えられる接合材が必要とされています。
SiCなどのパワーデバイス向け接合材としては、金属ナノ粒子が代替候補材として注目されており、イオンマイグレーション※1耐性や製造コストの観点で特に銅ナノ粒子が期待されています。金属ナノ粒子接合材は、一般的にはペースト状ですが、溶媒除去のために予備乾燥工程が必要であったり、ナノ粒子を焼結させる際にバインダーの熱分解除去により発生するガスが接合層にボイドやクラックを形成するリスクを抱えているため、高い接合強度の維持と、信頼性の確保が課題でした。
2.銅ナノ粒子を用いたシート状接合材の概要
大陽日酸では、酸素燃焼技術を利用して、粒子径100 nm程度で表面が数nm程度の亜酸化層で覆われている銅ナノ粒子を乾式で大量製造できる技術を保有しており、本プロセスで合成された粒子は還元雰囲気下において150℃での低温焼成が可能であることが特徴です。※2
本プロセスで合成されたバインダーレスの銅ナノ粒子を用いて、少量の還元剤の添加および接合層の構造を最適化することで、水素などの還元性ガスを加えることなく、窒素雰囲気中で予備乾燥なしに接合することができ(図1)、高い接合強度と優れた信頼性を併せ持つシート状接合材(写真1)の開発に成功いたしました。
本接合材を用いて、SiCと銅板を接合したサンプルは、1000回を超えるヒートサイクル試験においても界面剥離が見られず、高い信頼性が確保されていることが確認できました。
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)
写真1 シート状銅ナノ粒子接合材 図1 300℃、5分接合における接合圧力と
せん断強度の相関
3.今後の予定
今後、本接合材のユーザーPRおよびユーザー展開を進めていきます。
本成果に関しては、2020年1月29日(水)にパシフィコ横浜で開催される『第26回「エレクトロニクスにおけるマイクロ接合・実装技術」シンポジウム(mate2020)』にて口頭発表(A会場、プログラムNo.19)いたします。
また、2020 年1月29 日(水)~1月31 日(金)に東京ビッグサイトで開催される『新機能性材料展2020』の大陽日酸ブース(西3ホール、3W-N09)』において展示を行います。
(注)
※1 イオンマイグレーション:湿度が多い環境で電圧を印加した場合、電極間をイオン化した金属が移動し短絡が生じる現状
※2 2014 年1月14 日付ニュースリリース 「
酸素燃焼による画期的な金属ナノ粒子合成技術を開発」
本件に関するお問い合わせ
大陽日酸株式会社
東京都品川区小山1-3-26
管理本部広報・IR部
TEL:03-5788-8015